Designing and Fabricatin&licro-PressureSensors for Spiral Chff Electrodes

Ab~fluct-Cuff electrode an important component of neural prostheseq has been developed and improved in many research groups It is well known that cuff electrode has the potential hazard of causing nerve in& by compression. The goal of this study is to design a spiral cuff electrode witkmbedded micr &pressure sensor by using g i c r 0-glectr @mechanical system (MEMS) technologies. The pressure sensor4 serving as an on-line well-being monitor,can prevent Lcbemic necrosis of a nerve from excessive pressure We adopted capacitive mechanism as the basic configuration, because of its high sensitivity and good noise resistance. Tbesensor was designed and simulated witlfkite element analyses.